PPS Polymer Shortage? High Performance VICTREX® PEEK Polymer greatly improves the semiconductor fabrication process.
For demanding CMP retaining rings, VICTREX PEEK Polymer offers exceptional high dimensional stability, chemical resistance, bottom surface and inner edge surface wear resistance, good vibration characteristics, ease of processing, and mechanical properties, including strength, ability to be machined to extremely tight tolerances, and compatibility with process components such as slurries. The results that benefit you? More wafer passing during fabrication, lower downtime, and lower cost per wafers.
Not only can VICTREX PEEK Polymer meet your CMP ring needs, it is readily available for arrival within seven business days anywhere in the world. Do you want to know more now? Contact us.
As a key stage in the semiconductor wafer fabrication process, chemical mechanical planarization (CMP) requires tight process control, tight tolerances, and high quality of surface topography and planarity. With product and electronic device miniaturization continuing to place ever greater demands on process capabilities, these factors become more critical, and this in turn places greater demands on the nature of the retaining ring component that forms the key part of the CMP process.
Designed to contain and position the wafer as it is being planarized, the CMP retaining ring can produce low polishing rates, and uniform surface finish with a tight flatness tolerance, in addition to high material stability with low vibration characteristics, but only with proper CMP ring material selection and design. In particular, if the bottom surface of the retaining ring is very flat, this gives higher wafer fabrication yields.
VICTREX PEEK Polymer performs extremely well in all CMP processes. It is ideally suited for CMP retaining rings because of its:
- Outstanding wear properties
- better wear resistance than PPS in all processes
- better ring uniformity across CMP ring face
- Low defectivity rates
- VICTREX PEEK rings demonstrate equivalent or better defectivity rates vs. PPS
- Flexible processing
- injection molding, extrusion and compression molding
- Easy to machine and outstanding dimensional stability
- Inherently pure and very stable
- low particle shedding, low extractables
- Resistant to broad range of CMP chemical environments
- pH range of VICTREX PEEK Polymer: 2-14
- Excellent cost/peformance balance
- lower per wafer processing cost than PPS
- Wear properties can be customized with fillers
- up to eight times the life of a PPS ring
To learn more, please attend our VICTREX semiconductor webinar or visit our literature library to download the CMP Ring brochure.
Please visit our contact locations for a local team member who can personally assist you.
